Product Description
Full-Scale Flow Range: 6 to 50 slm. Control Valve: Normally Closed. Electronics: Aera 9-Pin D Connector. Type of Gas: Ar (Argon). Flow Range of Gas (sccm or slm): 10 slm. Aera Advanced Energy Industries FC-7810CD Mass Flow Controller, FC-7800 Series, 10 slm, Ar - Aera FC-7800 Series MFCs - Precise, Reliable, Metal-Sealed Design - SPECIFICATIONS: Brand: Aera (Advanced Energy Industries, Now Part of Hitachi Metals). Product Type: FC Mass Flow Controller. Full-Scale Flow Range: 6 to 50 slm. Control Valve: Normally Closed. Electronics: Aera 9-Pin D Connector. Type of Gas: Ar (Argon). Flow Range of Gas (sccm or slm): 10 slm. Fittings: 4VCR Fittings. N2 Flows: 7090.700 SCCM @ 100% or 3547.400 SCCM @ 50%. Model Also Known As: Novellus 22-118135-00.. AERA. Aera. FC-7810CD.