Product Description
Series: Quantum 930. Type (AOPLPNC): Air Operated, Low Pressure, Normally Closed. Material (S): 316 VAR Stainless Steel. Part # Suffix (E1111): E1111. Known Alias OEM Part #(s): 101-32025-000. The 930 Series valves are designed for ultra high purity applications for Semiconductor OEM and process wafer manufacturing. The 930 Series is available with a variety of manual operators and air operated actuators. The air operated actuators are provided with an LP (125 PSI) or an MP (300 PSI) operating range. The 300 psig operating pressure for both the manual and the AOPMP (mid-pressure) valves offers an extended application range for this product series. Standard surface finish 5 micro inch Ra. Internally threadless and springless. Fully functional from vacuum to 300 psig. High cycle life (including corrosive service). 100% Helium leak tested. Standard full internal electroplish. Minimal particle generation and particle entrapment areas. Vericleanâ€ΕΎÂ¢, Veriflo's low sulfur high purity 316L Stainless Steel enhances electropolishing, welding, and corrosion resistance. BODY MATERIAL VeriClean 316L Stainless Steel; DIAPHRAGM MATERIAL Elgiloy, equivalent; SEAT MATERIAL PCTFE (std), PEEK, Vespel; CAP MATERIAL 17-4 Stainless Steel; NUT MATERIAL 316L Stainless Steel; HOUSING MATERIAL Anodized Aluminum; PROOF PRESSURE 188 psig (13 barg); BURST PRESSURE 375 psig (26 barg); FLOW CAPACITY (CV) Cv 0.3; INTERNAL LEAK RATE ? 1 x 10¯9 scc/sec He; EXTERNAL LEAK RATE ? 2 x 10¯10 scc/sec He; INTERNAL VOLUME (CC) 2.64 cc; WEIGHT (LBS) 1.75; WEIGHT (KG) 0.8; SWITCH TYPE Single Pole, Single Throw (SPST), Momentary Action, Non-Adjustable; LEAD LENGTH (INCH) 7 inch lead; WIRING 26 AWG, UL Style 1061, equal twisted pair; WIRE CONNECTION 1/8" strip tinned ends; MAXIMUM INLET PRESSURE (PSIG) 125 psig; MAXIMUM INLET PRESSURE (BARG) 8.6 barg; ACTUATION PRESSURE 75 psig nominal (5 barg); BAKE OUT TEMPERATURE (C) 121°C in the open position; BAKE OUT TEMPERATURE (F) 250°F in the open position; MAXIMUM WORKING TEMPERATURE (C) 66°C; MAXIMUM WORKING TEMPERATURE (F) 150°F; MINIMUM WORKING TEMPERATURE (C) -40°C; MINIMUM WORKING TEMPERATURE (F) -40°F. Veriflo. Parker. 54015197.